Abstract: In order to reduce the crosstalk in TSV Array, this paper builds an RC model of TSV Array, uses a pair of differential TSVs in it, analyzes the crosstalk suppression, estimates the crosstalk influence of each point in the array and gets an optimized design method. 3×3 TSV Array model is built and simulated by electromagnetic field simulation tool, which is used to find optimal differential TSVs arrangement. Analysis and results of research indicate that the crosstalk noise of using differential TSVs will decrease at least 4 db comparing to only using single-ended TSV, and finally get optimal arrangement of differential TSVs.