Abstract: This paper presents a novel High-Pass cascade Σ-Δ modulator for MEMS gyroscope.The work is fabricated in a 0.35 μm CMOS technology with 3.3 V supply voltage.The structure is unconditional stable based on 1-1-1 Multi-stage noise Shaping (MASH) .Chopper stabilization method is used for eliminating 1/f noise and DC offset of the OTA.The use of High-Pass integrator has optimized the transmission of low frequency signal without disturbance.This modulator is capable of handling signals with 40 kHz bandwidth and amplitudes ranging from microvolts to hundreds of millivolts in MEMS gyroscope.The sampling rate is 10.24 MSamples/sec.Dynamic rang of the modulator is over 100 dB with a resolution of 17 bit.