Abstract: With the continuous development of VLSI technology, the increasing soft error problem has caused more and more serious impact on system reliability. The analysis of circuit soft error rate can be used to evaluate the system reliability and support the system reinforcement. This paper proposed a method to analyze soft error sensitivity for SystemC:evaluating the system soft error sensitivity according to the area factor and statistical result based on fault injection on system interface and internal signals by stratified sampling strategy. This experiment takes the SystemC model which is the minimum system based on OR1200 processor as the research prototype, constructs the test platform based on the simulated fault injection method, and realizes the fault injection automation. Based on the total of about 300,000 times simulation experiment through 3 test procedures, the statistical analysis indicates that the register file, PC generator and instruction cache modules are more sensitive for soft error.