Heat Generation Behavior of Silicon Layers in Ultra-thin SOI MOSFETs
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Abstract
In this work, we investigated the source heat of self-heating in SOI MOSFETs, heat generation behavior, deeply.It shows that Joule heating effect caused by saturation current is the main source of heat in statistic circuits; while the switch heating effects from the parasitic capacitance charge and discharge process caused by switch current dominate in dynamic circuits.
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