The Research and Prospect on Independent and Controllable Key Technologies of Microsystems

Microsystem technology is an important way to continue Moore's Law in the post Moore era, which can meet the urgent demand for miniaturized and multi-functional electronic systems in the electronic equipment. Due to the great differences on the conditions and layout between the domestic and overseas fundamental industries, it is impossible to completely duplicate the overseas roadmap on microsystem technology. Based on the current situation of the domestic integrated circuit industry and the packaging and testing industry, we should adopt an independent and controllable technology roadmap that is suitable for China's national situation. This paper is based on the preparation process of the microsystem including the product design, manufacturing and testing. It analyzes the key technologies on system design, simulation, advanced packaging and integrated testing of microsystems. Based on the analyses, the key technologies and solutions for independent innovation are deduced. Additionally, the future development prediction of microsystems is proposed.