Review of MEMS LiDAR

With the rapid progress of AI, autonomous driving and intelligent driving have stepped the first year of the industry. As the most important sensor in automatic driving, LiDAR technology is developing and iterating continuously. This paper introduces LiDAR, the research status home and abroad, and the key points and future of MEMS solid-state LiDAR. This paper introduces the technical parameters and indexes of MEMS mirror, the core component of MEMS LiDAR, such as field of view angle, optical aperture, scanning speed, scanning frequency, MEMS mirror size and quality factor(FoM). Finally, the application status of vehicle-mounted LiDAR is described, and the future and development of vehicle-mounted MEMS LiDAR are prospected.