Abstract: Future unmanned equipment has a strong demand for miniaturization, intelligence, modularity, and low-cost in single-machine systems. Micro-systems with their advanced architecture, highly integrated components and large-scale low-cost advantages are well-suited to meet the development needs of future unmanned equipment. A comprehensive review of the current development and application status of microsystems is provided, and the future development direction based on the development needs of unmanned equipment is prospected. Firstly, the development status of microsystems is introduced from Radio Frequency(RF) microsystems, information processing microsystems, and navigation microsystems. Secondly, the application status of microsystems on missile weapon systems and unmanned aerial vehicle platforms is summarized. Finally, combined with the development requirements of unmanned equipment, we forecast trends towards intelligent reconfiguration, interconnection standardization, low cost solutions that offer single chip multi-functionality as well as high reliability.