黄明亮,尹斯奇,周德祥,等.航天电子微焊点液-固界面反应过程中的尺寸效应与工艺优化[J]. 微电子学与计算机,2023,40(11):136-142. doi: 10.19304/J.ISSN1000-7180.2023.0487
引用本文: 黄明亮,尹斯奇,周德祥,等.航天电子微焊点液-固界面反应过程中的尺寸效应与工艺优化[J]. 微电子学与计算机,2023,40(11):136-142. doi: 10.19304/J.ISSN1000-7180.2023.0487
HUANG M L,YIN S Q,ZHOU D X,et al. Size effect of solder ball on interfacial reaction of aerospace solder joints and soldering process optimization[J]. Microelectronics & Computer,2023,40(11):136-142. doi: 10.19304/J.ISSN1000-7180.2023.0487
Citation: HUANG M L,YIN S Q,ZHOU D X,et al. Size effect of solder ball on interfacial reaction of aerospace solder joints and soldering process optimization[J]. Microelectronics & Computer,2023,40(11):136-142. doi: 10.19304/J.ISSN1000-7180.2023.0487

航天电子微焊点液-固界面反应过程中的尺寸效应与工艺优化

Size effect of solder ball on interfacial reaction of aerospace solder joints and soldering process optimization

  • 摘要: 针对微型化趋势下焊球的尺寸效应问题,研究了航天电子微焊点互连工艺过程中液-固界面反应与微观组织的影响规律,并对互连工艺进行了优化. 具体研究了不同直径(200、400 μm)的Sn-3.0Ag-0.5Cu和Sn-37Pb焊球分别在球栅阵列(BGA)器件侧金属化层(电镀Ni/Au)上进行单侧植球回流焊后的尺寸效应现象. 研究结果表明:Sn-37Pb焊点界面处生成针状或短棒状的Ni3Sn4类型的金属间化合物(IMC)晶粒;Sn-3.0Ag-0.5Cu焊点界面处生成不规则的块状(Cu,Ni)6Sn5晶粒. 两种类型的焊点在液-固界面反应过程中均表现出明显的尺寸效应现象,即焊球尺寸越小,界面生成的IMC晶粒直径越大,IMC层越厚. 基于建立的浓度梯度控制(CGC)界面反应理论模型,揭示了界面反应尺寸效应产生的原因与界面反应进程中界面溶质原子的浓度梯度相关,较小尺寸焊点界面处的溶质原子浓度梯度较小,溶质原子扩散通量较低,形成的界面IMC晶粒较大. 基于CGC界面反应理论模型,对200 μm直径Sn-3.0Ag-0.5Cu焊点的单侧植球回流焊工艺参数进行了优化,工艺优化后界面生成的IMC晶粒直径减小了约60 %,并且焊点在150 oC高温时效1000 h后的剪切强度提高了34 %.

     

    Abstract: The size effect of solder ball on the liquid-solid interfacial reaction and microstructure evolution in the soldering process of aerospace electronic micro-solder joints was investigated, and then the soldering process was optimized. The size effect of Sn-3.0Ag-0.5Cu and Sn-37Pb solder balls with different diameters(200, 400 μm) after first reflowed with electroplated Ni/Au on Ball Grid Array (BGA) side to form micro joints was studied. The results showed that the Intermetallic Compound(IMC) at interface of Sn-37Pb micro solder joints was needle-like or short rod-like Ni3Sn4, while the interfacial IMCs of Sn-3.0Ag-0.5Cu micro solder joints were irregularly bulk (Cu,Ni)6Sn5. Both two types of micro solder joints showed an obvious size effect on liquid-solid interfacial reaction in the soldering process, i.e., when the solder ball becomes smaller, the grain diameter and thickness of interfacial IMC will be larger. Based on the Concentration Gradient Controlled(CGC) interfacial reaction theoretical model, the size effect was attributed to the concentration gradient of interfacial solute atoms. The interfacial solute atomic concentration gradient was smaller in micro joints with smaller size. The IMC grains in smaller micro joints were larger. Moreover, based on the CGC interfacial reaction theoretical model, the process parameters of the Sn-3.0Ag-0.5Cu (200 μm)/Au/Ni solder joints were optimized. The average diameter of interfacial IMC grains was reduced by about 60 % under the optimized process parameters, and the shear strength of solder joints aged at 150 oC for 1000h was improved 34 %.

     

/

返回文章
返回