CHEN Chengying, WANG Yue, GAO Daifa, YING Jiayu, WANG Xiaoquan. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. Microelectronics & Computer, 2021, 38(9): 99-104.
Citation: CHEN Chengying, WANG Yue, GAO Daifa, YING Jiayu, WANG Xiaoquan. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. Microelectronics & Computer, 2021, 38(9): 99-104.

A two-step approximation capacitance-voltage circuit design for gyroscope application

  • For Micro Electro Mechanical Systems (MEMS) gyroscope detection application, a two-stage capacitance-voltage (CV) circuit is presented. The input common-mode feedback technology is used to reduce the input common-mode voltage drift caused by parasitic and gain capacitors. Meanwhile, combined with correlated double sampling, compensation and holding capacitor technology, the two-step approximation voltage output is realized, which decrease the gain error, improves the frequency and accuracy of output signal. The circuit is fabricated by SMIC 0.18 μm 1P6M CMOS process. The post-simulation results show that in 3.3 V supply voltage, with 500 kHz clock frequency, the maximum signal frequency is 20 kHz, the C-V sensitivity is 12.4 mV/fF. Within 100 Hz bandwidth the dynamic range (DR) is 62.3 dB, and average power consumption is 3.85 mW.
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