陈铖颖, 王悦, 高代法, 尹家宇, 王晓荃. 面向陀螺仪应用的两步逼近电容-电压转换电路[J]. 微电子学与计算机, 2021, 38(9): 99-104.
引用本文: 陈铖颖, 王悦, 高代法, 尹家宇, 王晓荃. 面向陀螺仪应用的两步逼近电容-电压转换电路[J]. 微电子学与计算机, 2021, 38(9): 99-104.
CHEN Chengying, WANG Yue, GAO Daifa, YING Jiayu, WANG Xiaoquan. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. Microelectronics & Computer, 2021, 38(9): 99-104.
Citation: CHEN Chengying, WANG Yue, GAO Daifa, YING Jiayu, WANG Xiaoquan. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. Microelectronics & Computer, 2021, 38(9): 99-104.

面向陀螺仪应用的两步逼近电容-电压转换电路

A two-step approximation capacitance-voltage circuit design for gyroscope application

  • 摘要: 设计了一款面向MEMS陀螺仪检测应用的两级电容-电压转换电路.电路采用输入共模反馈技术,降低了寄生电容和增益电容引起的输入共模电压漂移;同时结合相关双采样、补偿电容与保持电容技术,实现了两步逼近的电压输出,降低了增益误差,提高了输出信号频率和精度.电路采用SMIC 0.18 μm 1P6M工艺进行实现.后仿真结果表明:电源电压3.3 V,在500 kHz采样时钟频率下,最大处理信号频率20 kHz,电容-电压灵敏度为12.4 mV/fF;在100 Hz带宽内输出信号动态范围为62.3 dB,平均功耗3.85 mW。

     

    Abstract: For Micro Electro Mechanical Systems (MEMS) gyroscope detection application, a two-stage capacitance-voltage (CV) circuit is presented. The input common-mode feedback technology is used to reduce the input common-mode voltage drift caused by parasitic and gain capacitors. Meanwhile, combined with correlated double sampling, compensation and holding capacitor technology, the two-step approximation voltage output is realized, which decrease the gain error, improves the frequency and accuracy of output signal. The circuit is fabricated by SMIC 0.18 μm 1P6M CMOS process. The post-simulation results show that in 3.3 V supply voltage, with 500 kHz clock frequency, the maximum signal frequency is 20 kHz, the C-V sensitivity is 12.4 mV/fF. Within 100 Hz bandwidth the dynamic range (DR) is 62.3 dB, and average power consumption is 3.85 mW.

     

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