Abstract: Disc-Like MEMS oscillators are compared with quartz crystal oscillator counter parts in terms of phase-noise, jitter, and temperature stability. Base on these characteristics, a high gain, low noise and low power transimpedance amplifier is proposed to implement and driver a Disc-Like MEMS oscillator using TSMC 0.18 μm CMOS technology. Aiming at Disc-Like MEMS oscillators having a parasitic capacitance of 0.5 pF, a low-power broadband current pre-amplifier combined with a current-to-voltage conversion stage and an inverter based wideband Cherry-Hooper amplifier are used to realize the good tradeoff between gain, bandwidth, noise, lower power voltage and dynamic range.Spectre simulation indicate: the single-end transimpedance gain is 115 dBΩ, the -3 dB bandwidth is beyond 500 MHz, the average input equivalent noise current is 25 pA/\sqrt\mathrmHz, and the power dissipation is only 17.6 mW, The die size (including all the PADs) is as small as 620 μm×620 μm.